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A Physically Based Analytical Modeling of Threshold Voltage Control for Fully-Depleted SOI Double Gate NMOS-PMOS Flexible-FET

机译:基于物理的阈值电压控制分析建模   完全耗尽的sOI双栅NmOs-pmOs柔性FET

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摘要

In this work, we propose an explicit analytical equation to show thevariation of top gate threshold voltage with respect to the JFET bottom gatevoltage for a Flexible Threshold Voltage Field Effect Transistor (Flexible-FET)by solving 2-D Poisson's equation with appropriate boundary conditions,incorporating Young's parabolic approximation. The proposed model illustratesexcellent match with the experimental results for both n-channel and p-channel180nm Flexible-FETs. Threshold voltage variation with several important deviceparameters (oxide and silicon channel thickness, doping concentration) isobserved which yields qualitative matching with results obtained from SILVACOsimulations.
机译:在这项工作中,我们提出了一个明确的解析方程,以通过在适当的边界条件下求解二维Poisson方程来显示柔性阈值电压场效应晶体管(Flexible-FET)的顶栅阈值电压相对于JFET底栅电压的变化,结合杨氏抛物线近似。所提出的模型说明了与n沟道和p沟道180nm柔性FET的实验结果非常匹配。观察到阈值电压随几个重要器件参数(氧化物和硅沟道厚度,掺杂浓度)的变化,与SILVACO仿真得到的结果在质量上匹配。

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